Title:
Grayscale patterning for novel applications

Abstract:
Thermal scanning probe lithography is a direct-write technique which can achieve features down to 15nm. Like every technique, it has its own strengths and weaknesses. Grayscale patterning helped enable novel applications because of the closed feedback. This allows for reliable operation. Instead of working on and publishing a proof-of-principle methods paper, scientists could focus on the application. We can demonstrate live the feedback control and pattern different designs, sin waves, Fresnel lenses, biosurfaces.