Title:
Risk-Based Assessment of Expired Chemicals at DTU Nanolab.


Abstract:
This presentation outlines DTU Nanolab's risk-based approach to managing expired chemicals, focusing on potentially explosive peroxide-forming chemicals and container integrity. It will cover how expired materials are assessed and prioritized based on their age, hazards, storage conditions, and physical condition.

The presentation will also address safety considerations for photoresists and developers commonly used in semiconductor fabrication and cleanroom processes.

Dr. Jens Hemmingsen

I work at the Technical University of Denmark (DTU) as a Process and Hardware Specialist at DTU Nanolab, the university’s semiconductor fabrication facility. I specialize in photolithography, developing, optimizing, and maintaining lithography processes and equipment that support research, education, and industrial applications.
My work spans process development and characterization, equipment troubleshooting, maintenance, calibration, and hardware improvements, with a focus on achieving robust, reproducible processes and reliable equipment performance.
Beyond process and hardware engineering, I maintain the online technical knowledge base and learning platform for lithography. This includes developing and updating process documentation, troubleshooting guides, maintenance procedures, best practices, and technical course material used for the training and qualification of cleanroom users.
I also serve as an Internal Auditor, conducting process audits, evaluating compliance with quality management systems, and contributing to risk assessments and continuous improvement of technical documentation and operational procedures.
As an Occupational Health and Safety Representative, I additionally support a safe and well-functioning cleanroom environment for students, researchers, staff, and industrial users.

Talk