Title:
Grayscale patterning for novel applications
Abstract:
Thermal scanning probe lithography is a direct-write technique which can achieve features down to 15nm. Like every technique, it has its own strengths and weaknesses. Grayscale patterning helped enable novel applications because of the closed feedback. This allows for reliable operation. Instead of working on and publishing a proof-of-principle methods paper, scientists could focus on the application. We can demonstrate live the feedback control and pattern different designs, sin waves, Fresnel lenses, biosurfaces.
Eng. Eliott Clerc
After studying micro- and nanotechnology at ETH Zurich, he joined Heidelberg Instruments Nano in 2022 to enter the world of cutting-edge nanofabrication. As an R&D engineer in the Applications team, he carries out projects using the NanoFrazor. This includes work in 2D materials, biosurfaces and plasmonic structures. He is part of the team that maintains and expands the Recipe Book, developing new approaches to push the boundaries of nanofabrication using thermal scanning probe lithography.